☆
4.5
Article
Proceedings Paper
Selective plasma-induced deposition of fluorocarbon films on metal surfaces for actuation in microfluidics
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2004)
Rate this paper
The primary rating indicates the level of overall quality for the paper. Secondary ratings independently reflect strengths or weaknesses of the paper.
Find Funding. Review Successful Grants.
Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.
ExploreBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started