Journal
APPLIED SURFACE SCIENCE
Volume 270, Issue -, Pages 382-387Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2013.01.034
Keywords
Direct laser writing; Hybrid polymers; 3D microstructures; Opaque surfaces; Integrated microsystems; Electro conductive surfaces
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Funding
- Biomatrix grant from the Agency for Science, Innovation and Technology [31V-39/2012]
- Lithuanian Academy of Sciences
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Spectra of fields for applications of polymeric 3D micro/nanostructures are rapidly widening thus demanding the development of versatile precise and efficient fabrication methods that can be used to process a variety of materials and could be implemented to form tiny devices on a variety of surfaces without influencing their structural quality. We present the latest results obtained using laser lithography approach: 3D polymeric structures with submicrometer spatial resolution on different opaque surfaces such as semiconductors (Si) and various metals (Cr, Al, Fe and Ti). The photostructuring was performed using a range of photosensitive materials such as acrylate based AKRE23, acrylated biodegradable PEG-DA-258, epoxy based mr-NIL 6000, hybrid organic-inorganic SZ2080 and Ormocore b59. (c) 2013 Elsevier B.V. All rights reserved.
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