Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 23, Pages 9370-9373Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2012.03.185
Keywords
Laser interference lithography; Microchannels; Micro/nanofabrication
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This work presents the fabrication of hollow-core metallic structures with a complete laser interference lithography (LIL) process. A negative photoresist is used as sacrificial layer. It is exposed to the pattern resulting from the interference of two laser beams, which produces a structure of photoresist lines with a period of 600 nm. After development of the resist, platinum is deposited on the samples by DC sputtering and the resist is removed with acetone. The resulting metallic structures consist in a continuous platinum film that replicates the photoresist relief with a hollow core. The cross section of the channels is up to 0.1 mu m(2). The fabricated samples are characterized by FESEM and FIB. This last tool helps to provide a clear picture of the shape and size of the channels. Conveniently dimensioned, this array of metallic submicrometric channels can be used in microfluidic or IC cooling applications. (c) 2012 Elsevier B.V. All rights reserved.
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