Simulation of the Bosch process with a string-cell hybrid method

This paper presents a new two-dimensional (2D) simulator, which can simulate the etching polymerization alternation in the Bosch process for an infinite trench. Physical models for etching and deposition are developed. Having been implemented with these models and a string-cell hybrid method based on string structure and cell structure, this simulator has the ability to simulate the etching of different material types. After model parameter extraction from experiments, this simulator is used to simulate several phenomena in the Bosch process, including the formation and adjustment of sidewall scallops and the profile control of trench etching. The simulation results are compared with experiments and a good match can be found.