Journal
APPLIED SURFACE SCIENCE
Volume 258, Issue 1, Pages 13-18Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2011.07.130
Keywords
Carbon nanotube; Chemical vapor deposition; Catalyst; Pressure; Aggregation
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Funding
- Chinese Academy of Sciences [KJCX2. YW. M12]
- Key Foundation of National Natural Science of China [10834004]
- National Natural Science Foundation of China [O8BF041002]
- Ministry of Science and Technology of China [2009DFB50150]
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Catalyst aggregation affects the growth of carbon nanotube (CNT) arrays in terms of tubular structures, waviness, entanglement, lengths, and growth density etc., which are important issues for application developments. We present a systematic correlation between the aggregation of catalyst on the SiO2/Si substrate and the structure and morphology of CNT arrays. The thickness of the catalyst film has a direct effect on the areal density of the catalytic particles and then the alignment of the CNT array. Introducing alumina as buffer layer and annealing the catalyst film at low pressure are two effective approaches to downsize the catalyst particles and then the diameter, wall number of the CNTs. Both the size and areal density of the catalyst also change with the CNT growth in accordance with Ostwald ripening process, with the bottom of the CNT array varying from well-aligned to disordered and adhesion between catalyst particles and the substrate getting enhanced. Strategies including tuning the thickness of the catalyst film, changing buffer layer, controlling on the growth time and the system pressure were used to regulate the aggregation of the catalyst. CNT arrays from disordered to well-aligned, from multi-walled to few-walled and further to single-walled were reproducibly synthesized by chemical vapor deposition of acetylene. (C) 2011 Elsevier B. V. All rights reserved.
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