Powder synthesis of nano grade cerium oxide via homogenous precipitation and its polishing performance

The nano size cerium oxides (CeO2) were successfully synthesized by homogenous precipitation of ammonium cerium nitrate and urea. The precipitated cubic cerium oxide had primary particle size similar to8 nm with lattice constant about 5.61 Angstrom identified by diffraction pattern of transmission electron microscopy (TEM) analysis. The polishing performance of these powders had been discussed in this present work. The best polishing performance had been found. One weight percent sample C slurry has the. removal rate 2258 Angstrom/min for SiO2 film and 220 Angstrom/min for Si3Na4 (i.e. the selectivity = 10.2). High concentration of urea or the addition of H2O2 in the process seems hurt the polishing performance of these slurries. (C) 2004 Elsevier B.V. All rights reserved.