☆
4.8
Article
Processing of Y2O3 thin films by atomic layer deposition from cyclopentadienyl-type compounds and water as precursors
CHEMISTRY OF MATERIALS (2004)
Rate this paper
The primary rating indicates the level of overall quality for the paper. Secondary ratings independently reflect strengths or weaknesses of the paper.
Find the ideal target journal for your manuscript
Explore over 38,000 international journals covering a vast array of academic fields.
SearchBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started