Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 23, Pages 7242-7245Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2010.05.058
Keywords
Titanium oxynitride film; Reactive magnetron sputtering; Polyethylene terephthalate; Gas permeation; Activation energy
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Funding
- National Science Committee (NSC) of Taiwan/R.O.C. [NSC93-2216-E-005-024]
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Titanium oxynitride (TiNxOy) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density was the varied parameter. Experimental results show that the deposited TiNxOy films with a thickness of about 55 nm have similar contents of TiN, TiNxOy and TiO2 bonds, although they are deposited at different power densities. The TiNxOy films deposited at a lower power density have fewer internal defects and grain boundaries and possess higher activation energy and a lower rate of water vapor and oxygen transmission through TiNxOy/PET films. (C) 2010 Elsevier B. V. All rights reserved.
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