Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 6, Pages 3868-3874Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2008.10.069
Keywords
MoO3 thin films; Electron beam evaporation; Post-annealing; Optical properties; Oxygen vacancies
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Funding
- National Science Council of the Republic of China, Taiwan [NSC 95-2221-E-230010]
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Molybdenum oxide (MoO3) thin films were deposited by electron beam evaporation. The chemical composition, microstructure, optical and electrical properties of MoO3 thin films depend on the annealing temperature and ambient atmosphere. X-ray diffraction (XRD) shows that crystalline MoO3 films can be obtained at various post-annealing temperatures from 200 to 500 degrees C in N-2 and O-2. X-ray photoelectron spectroscopy (XPS) results reveal that the O-1s emission peak was shifted slightly toward lower binding energies as the annealing temperature in N-2 was increased. The oxygen vacancies and conductivity of MoO3 film increased with the annealing temperature. However, when the MoO3 films were annealed in an atmosphere of O-2, the optical transmission, the O/Mo ratio and the photon energy increased with the annealing temperature. The results differ from those for films annealed in a N-2 atmosphere. (c) 2008 Elsevier B.V. All rights reserved.
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