Journal
APPLIED SURFACE SCIENCE
Volume 256, Issue 1, Pages 183-186Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2009.07.105
Keywords
UV excimer laser; Laser drill; Microfilters; Nanopores
Categories
Funding
- NSF [0901711]
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [0901711] Funding Source: National Science Foundation
Ask authors/readers for more resources
We have demonstrated UV excimer laser drilled a submicron via hole with an entrance diameter of 300 nm inside a via hole with an entrance diameter of 5 mu m. The smaller via hole formation was due to the refocusing of the reflected UV light from the tapered side-wall of the bigger via hole and the wave-guide effect of the light trapped inside the smaller via hole. The aspect ration of the smaller vias hole was >200. This method could be used to fabricate microfilters or nanopores. Published by Elsevier B. V.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available