Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume 43, Issue 8B, Pages 5840-5844Publisher
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.43.5840
Keywords
double microlens array; self-alignment technology; LCD projector; brightness; dry etching; exposure; photo-polymerization method; three-dimensional shape
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A fabrication method for double-microlens arrays with self-alignment technology (SAT) is proposed. To satisfy the tolerance of the alignment of a two-layer-lens array, we developed a new fabrication method without an alignment process. Using SAT, we achieved a brightness increase of 30% compared with the conventional single-layer microlens array.
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