3.8 Article Proceedings Paper

Fabrication method of double-microlens array using self-alignment technology

Publisher

INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.43.5840

Keywords

double microlens array; self-alignment technology; LCD projector; brightness; dry etching; exposure; photo-polymerization method; three-dimensional shape

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A fabrication method for double-microlens arrays with self-alignment technology (SAT) is proposed. To satisfy the tolerance of the alignment of a two-layer-lens array, we developed a new fabrication method without an alignment process. Using SAT, we achieved a brightness increase of 30% compared with the conventional single-layer microlens array.

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