4.7 Article

Self-assembled InAs island formation on GaAs (110) by metalorganic vapor phase epitaxy

Journal

APPLIED SURFACE SCIENCE
Volume 254, Issue 7, Pages 2072-2076

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2007.08.055

Keywords

self-assemble; MOVPE; InAs island; GaAs (110)

Ask authors/readers for more resources

Formation of self-assembled InAs 3D islands on GaAs (1 10) substrate by metal organic vapor phase epitaxy has been investigated. Relatively uniform InAs islands with an average areal density of 10(9) cm(-2) are formed at 400 degrees C using a thin InGaAs strain reducing (SR) layer. No island formation is observed without the SR layer. Island growth on GaAs (I 10) is found to require a significantly lower growth temperature compared to the more conventional growth on GaAs (10 0) substrates. In addition, the island height is observed to depend only weakly on the growth temperature and to be almost independent of the V/III ratio and growth rate. Low-temperature photoluminescence at 1.22 eV is obtained from the overgrown islands. (C) 2007 Elsevier B.V. All rights reserved.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.7
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available