Journal
APPLIED SURFACE SCIENCE
Volume 255, Issue 4, Pages 1595-1598Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2008.05.003
Keywords
SNMS; Ga ion beam; Post-ionization; Femto-second laser; Photo-ionization; TOF-SIMS
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Characteristics of the post-ionization using femto-second laser (fs laser) combined with the secondary ion mass spectrometer were investigated. For many metals, ionization saturations were confirmed for the laser power density of >2 x 10(13) W/cm(2). The characteristic curve of ionization of Ag against the laser power density suggests the occurrence of ionization through the multi-photon resonance excitation. Sensitivity increase after employing the fs laser post-ionization was manifested and a sputtered Cu signal from a minute circular area with a diameter of about 200 nm could be detected clearly. (C) 2008 Elsevier B. V. All rights reserved.
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