Fabrication of PECVD-grown fluorinated hydrocarbon nanoparticles and circular nanoring arrays using nanosphere lithography

Nanosphere lithography (NSL) masks were created by spin-coating of polystyrene particles onto silicon surfaces. Fluorinated hydrocarbon films were coated on the nanosphere lithography masks using plasma-enhanced chemical vapor deposition (PECVD) to obtain ordered arrays of fluorinated hydrocarbon. Atomic force microscope images show hexagonally ordered nanodots of dimension 225 +/- 11 nm with a height of 23 +/- 4 nm. Every hexagon encloses a circular ring of diameter 540 +/- 24 nm having a height and width of 13.5 +/- 0.6 nm and 203 +/- 16 nm, respectively. FTIR analysis shows two distinct zones of atomic bonding of CHx and CFx in the plasma coated ordered fluorinated hydrocarbon films. (C) 2007 Elsevier B.V. All rights reserved.