Journal
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS
Volume 241, Issue 10, Pages 2246-2252Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssb.200404945
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The densities of states above and below the Fermi energy for the ZrO2/SiOxNy/n-Si system are examined by photoemission and inverse photoemission and compared with results from first principles calculations. The measured band gap of ZrO2 is 5.68 eV and the valence and conduction band offsets relative to silicon are 3.40 and 1.16 eV respectively. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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