Instant curvature measurement for microcantilever sensors

A multiple-point deflection technique has been developed for the instant measurement of microcantilever curvature. Eight light-emitting diodes are focused on various positions of a gold-coated silicon cantilever through optical fibers, and temperature change or chemical adsorption induces cantilever bending. The deflection at each point on the cantilever is measured with subnanometer precision by a position-sensitive detector, and thus the curvature of the cantilever is obtained. (C) 2004 American Institute of Physics.