Journal
APPLIED PHYSICS LETTERS
Volume 85, Issue 6, Pages 997-999Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1777415
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Single crystal substrates of SrTiO3 have been micromachined locally on their back faces to thicknesses between 10 and 100 mum using a mechanical abrasive technique. Subsequently, the growth surface has been treated to obtain atomically smooth unit cell terraces, suitable for high quality interfaces. Using a capacitor geometry, surface charge densities suitable for electrostatic doping of films have been obtained at the lowest temperatures, and the off-diagonal component of strain due to the applied electric field has been measured. (C) 2004 American Institute of Physics.
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