Journal
SURFACE SCIENCE
Volume 563, Issue 1-3, Pages 183-190Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.susc.2004.06.154
Keywords
X-ray photoelectron spectroscopy; electron-solid scattering and transmission -inelastic; electron-solid interactions; scattering; diffraction
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The inelastic scattering phenomenon of electrons in solids as seen by procedures using the Shirley-type empirical background is discussed. In close analogy with the Tougaard-type background correction procedure, the inelastic scattering cross-section function resulting in Shirley-equivalent background is derived. The main value of such a function-in addition to providing evidence that the Shirley method is based on a reasonable cross-section function-is in explaining the different energy dependence of both popular methods, especially near to photopeaks. The functional form of the scattering cross-section function is given, with some intuitively determined parameters. Evaluation methods based on the derived cross-section function have been implemented and tested. The cross-section based background calculation method nicely reproduces the results of the classic method and it can be used in generating peak tails, too. (C) 2004 Elsevier B.V. All rights reserved.
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