Journal
ANALYTICA CHIMICA ACTA
Volume 519, Issue 2, Pages 213-218Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.aca.2004.06.018
Keywords
GC-MS; phosphate esters; semiconductors; phthalate esters; clean room; indoor air
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A gas chromatograph-mass spectrometry (GC-MS) method has been developed for the simultaneous determination of phosphate and phthalate esters in clean room and indoor air. Dibutyl phthalate (DBP), diethylhexyl phthalate (DEHP), trimethyl phosphate (TMP) and seven other phosphate esters present in air were collected using a Waters Sep-Pak PS Air cartridge and extracted with acetone. A quantity of 4 mu of each extract was analyzed by GC-MS. Quantification limits for 2.88 m(3) of air sample were 2-20 ng m(-3) for phosphate esters and 100 ng m(-3) for plithalate esters. These values corresponded to 10 times the standard deviation of the peak areas. The breakthrough amounts of determinants in the Sep-Pak PS Air cartridge were 100 mug for trimethyl phosphate (TMP) and greater than or equal to2600 mug for the other nine components. Analytical results for air samples collected from three office rooms ranged from 100 to 320 ng m-3 for tributyl phosphate and 350 to 780 ng m(-3) for dibutyl phthalate. However, the concentration of the determinants in four newly built clean rooms were under the minimum limits for deten-nination of phosphate and phthalate esters in air. (C) 2004 Elsevier B.V. All rights reserved.
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