Nanochannel arrays on silicon platforms by electrochemistry

Nanochannel arrays with diameters as small as 30 nm and aspect ratios up to 250 were prepared on silicon platforms for the first time by electrochemistry, which is a fast, reproducible, and inexpensive technique. Ionic diffusion through the arrays was investigated in order to demonstrate the open nature of the channels and the absence of defects in the devices. Possible applications for separation, drug release, and bio-encapsulation were also illustrated by following glucose and protein diffusion across the membranes.