Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 2, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4862031
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Funding
- DARPA QuASAR program
- ONR YIP
- National Science Foundation [1125844]
- Clare Boothe Luce Foundation
- Taiwan Ministry of Education
- Direct For Mathematical & Physical Scien
- Division Of Physics [1125844] Funding Source: National Science Foundation
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A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB. (C) 2014 AIP Publishing LLC.
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