Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 15, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4872003
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Funding
- NSF [0960331, 0901886]
- FOM-NWO [08QIP6-2]
- Direct For Mathematical & Physical Scien
- Division Of Physics [1314982] Funding Source: National Science Foundation
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [0960331] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [0901886] Funding Source: National Science Foundation
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A method for fabrication of polarization degenerate oxide apertured micropillar cavities is demonstrated. Micropillars are etched such that the size and shape of the oxide front is controlled. The polarization splitting in the circular micropillar cavities due to the native and strain induced birefringence can be compensated by elongating the oxide front in the [110] direction, thereby reducing stress in this direction. By using this technique, we fabricate a polarization degenerate cavity with a quality factor of 1.7 x 10(4) and a mode volume of 2.7 mu m(3), enabling a calculated maximum Purcell factor of 11. (C) 2014 AIP Publishing LLC.
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