Journal
APPLIED PHYSICS LETTERS
Volume 104, Issue 21, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4879850
Keywords
-
Categories
Funding
- NSFC [61274037, 61274123]
- Zhejiang Provincial NSF [Z11101168, LR12F04001]
- Innovation Platform of Micro/Nanodevices and Integration System
- Cyber Innovation Joint Research Center, Zhejiang University
Ask authors/readers for more resources
Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ZnO films deposited on flexible polyethylene terephthalate substrates at 120 degrees C. Dual resonance modes, namely, the zero order pseudo asymmetric (A(0)) and symmetric (S-0) Lamb wave modes, have been obtained from the SAW devices. The SAW devices perform well even after repeated flexion up to 2500 le for 100 times, demonstrating its suitability for flexible electronics application. The SAW devices are also highly sensitive to compressive and tensile strains, exhibiting excellent anti-strain deterioration property, thus, they are particularly suitable for sensing large strains. (C) 2014 AIP Publishing LLC.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available