Application of X-ray scattering technique to the study of supersmooth surfaces

Applications of the X-ray scattering technique for studying supersmooth surfaces with rms roughness of 0.1-0.2 nm are discussed. The experimental schemes are analyzed and systematic errors on the determination of 2D and 1D PSD-functions are evaluated. Results of laboratory and synchrotron experiments are presented on the study of roughness of superpolished substrates made of different materials as well as for B4C films of different thickness. (C) 2004 Elsevier B.V. All rights reserved.