Moisture-driven crack growth in blanket low dielectric constant and ultralow dielectric constant films

Moisture-driven crack growth was measured as a function of film thickness for a variety of low dielectric constant and ultralow dielectric constant films and a comparison of the crack driving force was made. By plotting the crack velocity versus the crack driving force, a series of universal curves was produced which showed that fracture resistance scales with the dielectric constant. (C) 2004 American Institute of Physics.