Journal
APPLIED PHYSICS LETTERS
Volume 103, Issue 16, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4824827
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Funding
- Natural Science Foundation of China [51175444, 51075344, 61274120]
- Fundamental Research Funds for the Central Universities (Xiamen University) [2011121002]
- Xiamen Municipal Bureau of Science and Technology [3502Z20126006, 3502Z20123008]
- New Century Excellent Talents in Fujian Province University
- Shenzhen City Science and Technology Innovation Committee [JCYJ20120618155425009]
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This paper presents a passive wireless polymer-derived silicon carbonitride (SiCN) ceramic sensor based on cavity radio frequency resonator together with integrated slot antenna. The effect of the cavity sensor dimensions on the Q-factor and resonant frequency is investigated by numerical simulation. A sensor with optimal dimensions is designed and fabricated. It is demonstrated that the sensor signal can be wirelessly detected at distances up to 20 mm. Given the high-temperature stability of the SiCN, the sensor is very promising for high-temperature wireless sensing applications. (C) 2013 AIP Publishing LLC.
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