Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 11, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4798333
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- Russian Ministry of Education under the Federal Program Research and Development on Priority Directions of Scientific and Technological Complex of Russia [16.513.12.3025]
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First, the Al/AlN/Al/Cr/diamond single crystal piezoelectric layered structure has been developed, and its properties have been investigated up to 8GHz. The peculiarities associated with the influence of piezoelectric film on the Q factor of high overtones of substrate have been pointed out. High Q similar to 10(4) has been found at 6-7 GHz band. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4798333]
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