Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 14, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4801762
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Funding
- Industrial Strategic Technology Development Program [10035225]
- MKE/KEIT
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We have investigated the temperature dependence of negative bias under illumination stress and recovery. The transfer characteristics exhibits a non-rigid shift towards negative gate voltages. For both stress and recovery, the voltage shift in deep depletion is twice that in accumulation. The results support the mechanism we previously proposed, which is creation and annealing of a double donor, likely to be an oxygen vacancy. The time dependence of stress and recovery can be fitted to stretched exponentials. Both processes are thermally activated with activation energies 1.06 eV and 1.25 eV for stress and recovery, respectively. A potential energy diagram is proposed to explain the results. (C) 2013 AIP Publishing LLC.
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