A standing wave linear ultrasonic motor operating in face-diagonal-bending mode

We report a piezoelectric standing wave linear ultrasonic motor with double driving tips for generating precision motion. The motor's piezoelectric actuator was made of a simple Pb(Zr, Ti)O-3 square-plate (15 x 15 x 2mm(3)) operating in a single face-diagonal-bending standing wave mode to produce symmetric, bi-directional linear motion. The motor generated a driving force of 3.0N and a moving speed of up to 165 mm/s under a relatively low applied electric field of 75V(pp)/mm at a resonance frequency of 141.5 kHz. This motor is superior to those previously reported because of the double friction-tip standing wave driving mechanism and the operating mode. (C) 2013 AIP Publishing LLC.