Journal
SURFACE AND INTERFACE ANALYSIS
Volume 36, Issue 10, Pages 1423-U9Publisher
JOHN WILEY & SONS LTD
DOI: 10.1002/sia.1936
Keywords
AlGaAs; InGaAs; SIMS; certified reference material; gallium arsenide; grating; lateral resolution; length calibration; line spread function; nanometrology; strip pattern
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A new type of test sample for the determination of lateral resolution in surface analysis is presented. The certified reference material BAM-L002 'Nanoscale strip pattern for length calibration and testing of lateral resolution' is an embedded cross-section of epitaxially grown layers of AlxGa1-xAs and InxGa1-xAs on GaAs substrate. The surface of the sample provides a flat pattern with strip widths of 0.4-500 nm. The combination of gratings, isolated narrow strips and sharp edges of wide strips offers improved possibilities for the calibration of a length scale, the determination of lateral resolution and the optimization of instrument settings. The feasibility of the reference material for an analysis of lateral resolution is demonstrated for SIMS. Copyright (C) 2004 John Wiley Sons, Ltd.
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