Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 22, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4767995
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Funding
- Air Force Research Laboratory [FA9551-11-C-0033]
- National Science Foundation
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We demonstrate the continuous fabrication of large-area flexible metamaterial films via roll-to-roll (R2R) nanoimprint lithography (NIL) technique that can be conducted in an ambient environment at high speed. The plasmonic metal-insulator-metal structure is successfully fabricated by R2R NIL to continuously pattern the sub-wavelength scale metal disk array on flexible substrates. The patterned metal disks having varying diameters and sub-micron spacing with few defects lead to the desired broadband IR filtering performance at the designed dual-band, which correlates well with simulation analysis. Our method realizes a simple and high-throughput fabrication of plasmonic metamaterials for scalable and flexible optoelectronic and photonic applications. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767995]
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