Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 16, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4704187
Keywords
electrochemical electrodes; electrolytes; etching; nanowires; passivation; silicon compounds; supercapacitors
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Funding
- NSF, through the Center of Integrated Nanomechanical Systems [EEC-0832819, DMR-0804646]
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [0804646] Funding Source: National Science Foundation
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The development of passivated silicon nanowire (SiNW) based micro-supercapacitor electrodes for on-chip applications using an environmentally benign aqueous electrolyte is reported. The SiNWs, produced by low-temperature (50 degrees C) electrochemical etching, corrode during charge/discharge cycling in the aqueous environment, but upon coating with a silicon carbide passivation layer, the corrosion is mitigated. The as-formed materials are in electrical contact with the substrate, requiring no additional current collector. The passivated NWs achieve capacitance values up to similar to 1.7 mF/cm(2) projected area (comparable to state-of-the art carbon based micro-supercapacitor electrodes), exhibit robust cycling stability, and maintain capacitive behavior over a wide range of charge/discharge rates. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4704187]
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