Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 16, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4760274
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- AFOSR
- DARPA
- NSF
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Single-crystal diamond is a promising material for microelectromechanical systems (MEMs) because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338 000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4760274]
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