Journal
APPLIED PHYSICS LETTERS
Volume 100, Issue 10, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3690861
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Funding
- U.S. Department of Energy, BES-Materials Sciences [58931, 58932]
- NSFC [51001064]
- Innovation Method Program [2010IM031300]
- National Basic Research Program of China [2009CB623701]
- Specialized Research Fund for the Doctoral Program of Higher Education of China
- U.S. Department of Energy Office of Science Laboratory [DE-AC02-06CH11357]
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The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO2/In2O3 multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO2/In2O3 interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO2/In2O3 heterostructure that has potential to exhibit mixed conduction behavior. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.3690861]
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