Journal
OPTICS EXPRESS
Volume 12, Issue 20, Pages 4675-4680Publisher
OPTICAL SOC AMER
DOI: 10.1364/OPEX.12.004675
Keywords
-
Categories
Ask authors/readers for more resources
The planar waveguides have been fabricated in fused quartz by 3.0 MeV oxygen ion implantation at dose of 1x10(15) ions/cm(2). The guiding modes were observed at wavelengths of both 633 nm and 1539 nm before and after annealing at 320degreesC, 450degreesC and 500degreesC in 60 min characterized by the prism-coupling method. The width of the waveguide structure induced by oxygen ion implantation is about 3 microns. After suitable annealing, the minimum propagation loss of the waveguide in fused quartz can be reduced to -0.14 dB/cm. (C) 2004 Optical Society of America.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available