Journal
JOURNAL OF APPLIED PHYSICS
Volume 96, Issue 8, Pages 4563-4568Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1785850
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We report on measurements of the thermal conductivity of reactively sputtered aluminum nitride (AlN) thin films with different thickness, ranging from 100 nm to 1 mum, on silicon substrates. The measurements were made at room temperature using the pulsed photothermal reflectance technique. The thermal conductivities of the sample are found to be significantly lower than the single-crystal bulk AlN and increase with an increasing thickness. The thermal resistance at the interface between the AlN film and the silicon substrate is found to be about 7-8x10(-8) m(2) K/W. (C) 2004 American Institute of Physics.
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