Journal
APPLIED PHYSICS LETTERS
Volume 85, Issue 17, Pages 3769-3771Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1809272
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We report here the growth and transport studies of conductive n-type AlxGa1-xN alloys with high Al contents (xgreater than or equal to0.7). Si-doped AlxGa1-xN alloys were grown by metalorganic chemical vapor deposition on AlN-epilayer/sapphire substrates with very smooth surface. Low n-type resistivities have been obtained for Al-rich AlxGa1-xN alloys. The resistivity was observed to increase rapidly with increasing x due to the deepening of the Si donor energy level. Transport measurements have indicated that we have achieved n-type conduction in pure AlN. From the temperature dependence of the resistivity, the donor activation energy was estimated to vary from 23 to 180 meV as x was increased from 0.7 to 1.0. (C) 2004 American Institute of Physics.
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