Journal
APPLIED PHYSICS LETTERS
Volume 99, Issue 19, Pages -Publisher
AIP Publishing
DOI: 10.1063/1.3660263
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Funding
- DTRA
- NSF [CBET-0744879, CMMI-1000686]
- Directorate For Engineering
- Div Of Chem, Bioeng, Env, & Transp Sys [0744879] Funding Source: National Science Foundation
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We report a simple and scalable bottom-up technique for fabricating broadband antireflection gratings on solar-grade multicrystalline silicon (mc-Si) wafers. A Langmuir-Blodgett process is developed to assemble close-packed silica microspheres on rough mc-Si substrates. Subwavelength moth-eye pillars can then be patterned on mc-Si by using the silica microspheres as structural template. Hemispherical reflectance measurements show that the resulting mc-Si gratings exhibit near zero reflection for a wide range of wavelengths. Both experimental results and theoretical prediction using a rigorous coupled-wave analysis model show that close-packed moth-eye arrays exhibit better antireflection performance than non-close-packed arrays due to a smoother refractive index gradient. (C) 2011 American Institute of Physics. [doi:10.1063/1.3660263]
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