Journal
APPLIED PHYSICS LETTERS
Volume 99, Issue 1, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3607306
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- Grants-in-Aid for Scientific Research [10F00368] Funding Source: KAKEN
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AlGaN/AlN quantum wells (QWs) emitting at 247 nm grown by metalorganic vapor phase epitaxy. The extremely high IQEs were achieved by examining the source-supply sequence. QWs fabricated by a continuous source-supply method have longer emission wavelengths (lambda) and higher IQEs compared to QWs fabricated by modified migration enhanced epitaxy (MMEE). MMEE is an alternating source-supply method where the NH(3) interruption promotes Ga evaporation. Thus, to obtain the same lambda, MMEE requires a lower growth temperature than the continuous method, compromising the quality of the AlN and AlGaN layers as well as the IQE of QWs. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3607306]
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