Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 18, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3587767
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- IGSSE
- CompInt graduate schools
- Technische Universitat Munchen-Institute for Advanced Study, German Excellence Initiative
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We have developed a straightforward plasma-based method which yields chlorine-terminated n-type 6H-SiC surfaces. Atomic force microscopy shows that the surface roughness is not affected by the plasma processing. Additionally, x-ray photoelectron spectroscopy reveals a significant reduction in oxygen, and a corresponding rise of chlorine core level intensities, following halogen termination. Contact potential difference and surface photovoltage measurements show formation of negative surface dipoles and approximately flat band surface potentials after chlorine termination of (0001) n-type 6H-SiC (built-in voltage V(bi) < 20 meV). Starting from halogenated surfaces, we demonstrate both ultraviolet light-induced and thermally-induced functionalization with alkene-derived self-assembled organic monolayers. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3587767]
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