Journal
APPLIED PHYSICS LETTERS
Volume 98, Issue 23, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3597798
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Funding
- Air Force Office of Scientific Research [FA9550-08-1-0101]
- NSF STC MDITR Center [DMR0120967]
- Washington Research Foundation
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We report on low-loss asymmetric strip-loaded slot waveguides in silicon-on-insulator fabricated with 248 nm photolithography. Waveguide losses were 2 dB/cm or less at wavelengths near 1550 nm. A 40 nm strip-loading allows low-resistance electrical contact to be made to the two slot arms. The asymmetric design suppresses the TE1 mode while increasing the wavelength range for which the TE0 mode guides. This type of waveguide is suitable for building low insertion-loss, high-bandwidth, low drive-voltage modulators, when coated with an electro-optic polymer cladding. (C) 2011 American Institute of Physics. [doi:10.1063/1.3597798]
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