Residual and nitrogen doping of homoepitaxial nonpolar m-plane ZnO films grown by molecular beam epitaxy

We report the homoepitaxial growth by molecular beam epitaxy of high quality nonpolar m-plane ZnO and ZnO:N films over a large temperature range. The nonintentionally doped ZnO layers exhibit a residual doping as low as similar to 10(14) cm(-3). Despite an effective incorporation of nitrogen, p-type doping was not achieved, ZnO:N films becoming insulating. The high purity of the layers and their low residual n-type doping evidence compensation mechanisms in ZnO:N films. (C) 2011 American Institute of Physics. [doi:10.1063/1.3572025]