Wavelength tuning of an antenna-coupled infrared microbolometer

Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.15 mum near 10 mum. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees with measured results. (C) 2004 Ame rican Vacuum Society.