4.6 Article

A poly-silicon TFT witha sub-5-nm thick channel for low-lower gain cell memory in mobile applications

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 51, Issue 11, Pages 1805-1810

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2004.836546

Keywords

MOSFETs; semiconductor memories; thin film transistors (TFTs)

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This paper presents a gain-cell solution in which a novel ultrathin polysilicon film transistor provides the basis for dense and low-power embedded random-access memory (RAM). This is made possible by the new transistor's 2-nm-thick channel, which realizes a quantum-confinement effect that produces a low leakage current value of only 10(-19) A at room temperature. The memory has the potential to solve the power and stability problems that static RAM (SRAM) is going to face in the very near future.

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