4.6 Article

Enhanced annealing of implantation-induced defects in 4H-SiC by thermal oxidation

Related references

Note: Only part of the references are listed.
Article Physics, Applied

Elimination of the Major Deep Levels in n- and p-Type 4H-SiC by Two-Step Thermal Treatment

Toru Hiyoshi et al.

APPLIED PHYSICS EXPRESS (2009)

Article Physics, Applied

Lifetime-limiting defects in n- 4H-SiC epilayers -: art. no. 052110

PB Klein et al.

APPLIED PHYSICS LETTERS (2006)

Article Materials Science, Multidisciplinary

Electrical characterization of metastable carbon clusters in SiC: A theoretical study

A Gali et al.

PHYSICAL REVIEW B (2006)

Article Physics, Applied

Deep levels created by low energy electron irradiation in 4H-SiC

L Storasta et al.

JOURNAL OF APPLIED PHYSICS (2004)

Article Materials Science, Multidisciplinary

Ab initio study of the migration of intrinsic defects in 3C-SiC -: art. no. 205201

M Bockstedte et al.

PHYSICAL REVIEW B (2003)

Article Physics, Applied

Effect of crystal orientation on the implant profile of 60 keV Al into 4H-SiC crystals

J Wong-Leung et al.

JOURNAL OF APPLIED PHYSICS (2003)