Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 1, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3280040
Keywords
capacitors; flexible electronics; inductors; microwave integrated circuits; MIM devices; polymers; Q-factor; thin film transistors
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Funding
- AFOSR MURI [FA9550-08-1-0337]
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This letter reports the realization of bendable inductors and capacitors integrated on a polyethylene terephthalate substrate that can operate at high microwave frequencies. A low-temperature fabrication process compatible with flexible thin-film transistors (TFTs) was developed. By employing bendable dielectric materials, spiral inductors and metal-insulator-metal capacitors with high quality factors and high resonance frequencies were demonstrated. The effects of mechanical bending on the performance of inductors and capacitors were also measured and analyzed. These demonstrations combined with previously demonstrated microwave TFTs will lead to flexible radio-frequency and microwave systems in the future.
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