Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 21, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3514234
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Funding
- Air Force Office of Scientific Research [FA9550-10-1-0053]
- NSF STC MDITR Center [DMR 0120967, CHE 0851730, DMR0120967AM10]
- Washington Research Foundation
- Mary Gates Endowment
- Washington NASA Space Grant Consortium
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We demonstrate low loss ridge waveguides and the first ring resonators for the mid-infrared, for wavelengths ranging from 5.4 to 5.6 mu m. Structures were fabricated using electron-beam lithography on the silicon-on-sapphire material system. Waveguide losses of 4.0 +/- 0.7 dB/cm are achieved, as well as Q-values of 3.0 k. (C) 2010 American Institute of Physics. [doi:10.1063/1.3514234]
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