Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 1, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3280044
Keywords
finite element analysis; geometrical optics; microcavities; micromechanical resonators; optical polymers
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Funding
- DFG Research Center for Functional Nanostructures (CFN) Karlsruhe [A5.4]
- Ministry of Science, Research and the Arts of Baden-Wurttemberg [Az: 7713.14-300]
- Concept for the Future of the Karlsruhe Institute of Technology (KIT)
- German Excellence Initiative
- Karlsruhe School of Optics and Photonics (KSOP)
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We report on the fabrication of high-Q microresonators made of low-loss, thermoplastic polymer poly(methyl methacrylate) (PMMA) directly processed on a silicon substrate. Using this polymer-on-silicon material in combination with a thermal reflow step enables cavities of conical geometry with an ultrasmooth surface. The cavity Q factor of these PMMA resonators is above 2x10(6) in the 1300 nm wavelength range. Finite element simulations show the existence of a variety of whispering gallery modes in these resonators explaining the complexity of the measured transmission spectra.
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