4.6 Article

Photonic crystal cavities in silicon dioxide

Journal

APPLIED PHYSICS LETTERS
Volume 96, Issue 3, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.3297877

Keywords

photonic crystals; silicon compounds

Funding

  1. MARCO Interconnect Focus Center
  2. Toshiba corporation
  3. NSF

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One dimensional nanobeam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 10(4) are found via simulation, while quality factors of over 5x10(3) are found in experiment, for cavities with mode volumes of 2.0(lambda/n)(3) and in the visible wavelength range 600-716 nm. The dependences of the cavity quality factor and mode volume for different design parameters are also considered.

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