Journal
APPLIED PHYSICS LETTERS
Volume 96, Issue 25, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3457444
Keywords
micromechanical resonators; optical sensors; temperature sensors; whispering gallery modes
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A high-sensitivity thermal sensing is demonstrated by coating a layer of polydimethylsiloxane (PDMS) on the surface of a silica toroidal microresonator on a silicon wafer. Possessing high-Q whispering gallery modes (WGMs), the PDMS-coated microresonator is highly sensitive to the temperature change in the surroundings. We find that, when the PDMS layer becomes thicker, the WGM experiences a transition from redshift to blueshift with temperature increasing due to the negative thermal-optic coefficient of PDMS. The measured sensitivity (0.151 nm/K) is one order of magnitude higher than pure silica microcavity sensors. The ultrahigh resolution of the thermal sensor is also analyzed to reach 10(-4) K. (C) 2010 American Institute of Physics. [doi:10.1063/1.3457444]
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